@article {58924, title = {Drifting potential humps in ionization zones: The {\textquotedblleft}propeller blades{\textquotedblright} of high power impulse magnetron sputtering}, journal = {Applied Physics Letters}, volume = {103}, year = {2013}, month = {10/2013}, pages = {144103}, abstract = {

Ion energy distribution functions measured for high power impulse magnetron sputtering show features, such as a broad peak at several 10\ eV with an extended tail, as well as asymmetry with respect to E {\texttimes} B, where E and B are the local electric and magnetic field vectors, respectively. Here it is proposed that those features are due to the formation of a potential hump of several 10\ V in each of the traveling ionization zones. Potential hump formation is associated with a negative-positive-negative space charge that naturally forms in ionization zones driven by energetic drifting electrons.

}, keywords = {Electric fields, ionization, plasma ionization, sputter deposition, sputtering}, issn = {00036951}, doi = {10.1063/1.4823827}, author = {Andr{\'e} Anders and Matjaž Panjan and Robert Franz and Joakim Andersson and Pavel A. Ni} } @article {11792, title = {Electrochromic lithium nickel oxide by pulsed laser deposition and sputtering}, journal = {Solar Energy Materials and Solar Cells}, volume = {54}, number = {4-Jan}, year = {1998}, month = {07/1998}, pages = {59-66}, chapter = {59}, abstract = {

Thin films of lithium nickel oxide were deposited by sputtering and pulsed laser deposition (PLD) from targets of pressed LiNiO2 powder. The composition and structure of these films were analyzed using a variety of techniques, such as nuclear-reaction analysis, Rutherford backscattering spectrometry (RBS), X-ray diffraction, infrared spectroscopy, and atomic-force microscopy. Crystalline structure, surface morphology and chemical composition of LixNi1-xO thin films depend strongly on deposition oxygen pressure, temperature as well as substrate{\textendash}target distance. The films produced at temperatures lower than 600{\textdegree}C spontaneously absorb CO2 and H2O at their surface once they are exposed to the air. The films deposited at 600{\textdegree}C proved to be stable in air over a long period. Even at room temperature the PLD films are denser and more stable than sputtered films. RBS determined the composition of the best films to be Li0.5Ni0.5O deposited by PLD at 60\ mTorr O2 pressure. Electrochemical tests show that the films exhibit excellent reversibility in the range 1.0{\textendash}3.4\ V versus lithium. Electrochemical formatting which is used to develop electrochromism in other films is not needed for the stoichiometric films. The optical transmission range is almost 70\% at 550\ nm for 150\ nm-thick films. Devices made from these films were analyzed using novel reference electrodes and by disassembling after cycling.

}, keywords = {Lithium nickel oxide, pulsed laser deposition, sputtering}, doi = {10.1016/S0927-0248(97)00223-7}, author = {Michael D. Rubin and Shi-Jie Wen and Thomas J. Richardson and John B. Kerr and Klaus von Rottkay and Jonathan L. Slack} }