@article {58925, title = {Drifting Ionization Zone in DC Magnetron Sputtering Discharges at Very Low Currents}, journal = {IEEE Transactions on Plasma Science}, volume = {42}, year = {2014}, month = {10/2014}, pages = {2578 - 2579}, abstract = {

Discharges with crossed electric and magnetic fields are known to develop instabilities that are crucial in the transport of charged particles. Sputtering magnetrons are no exception. While most recent studies focused on traveling ionization zones in high power impulse magnetron sputtering, we show here fast camera images of magnetron discharges at very low current. A single drifting ionization zone is always present, even down to the threshold current of about 10 mA.

}, issn = {0093-3813}, doi = {10.1109/TPS.2014.2334601}, author = {Andr{\'e} Anders and Pavel A Ni and Joakim Andersson} } @article {58924, title = {Drifting potential humps in ionization zones: The {\textquotedblleft}propeller blades{\textquotedblright} of high power impulse magnetron sputtering}, journal = {Applied Physics Letters}, volume = {103}, year = {2013}, month = {10/2013}, pages = {144103}, abstract = {

Ion energy distribution functions measured for high power impulse magnetron sputtering show features, such as a broad peak at several 10\ eV with an extended tail, as well as asymmetry with respect to E {\texttimes} B, where E and B are the local electric and magnetic field vectors, respectively. Here it is proposed that those features are due to the formation of a potential hump of several 10\ V in each of the traveling ionization zones. Potential hump formation is associated with a negative-positive-negative space charge that naturally forms in ionization zones driven by energetic drifting electrons.

}, keywords = {Electric fields, ionization, plasma ionization, sputter deposition, sputtering}, issn = {00036951}, doi = {10.1063/1.4823827}, author = {Andr{\'e} Anders and Matjaž Panjan and Robert Franz and Joakim Andersson and Pavel A. Ni} }