@article {12144, title = {Optical Constants of Sputter-Deposited Ti-Ce Oxide and Zr-Ce Oxide Films}, journal = {Applied Optics}, volume = {37}, number = {25}, year = {1998}, month = {09/1998}, pages = {5993-6001}, chapter = {5993}, abstract = {

Films of Ti oxide, Zr oxide, Ce oxide, Ti-Ce oxide, and Zr-Ce oxide were made by means of reactive dc magnetron sputtering in a multitarget arrangement. The films were characterized by x-ray diffraction and electrochemical measurements, both techniques being firmly connected to stoichiometric information. The optical constants n and k were evalued from spectrophotometry and from variable-angle spectroscopic ellipsometry. The two analyses gave consistent results. It was found that n for the mixed-oxide films varied smoothly between the values for the pure oxides, whereas k in the band-gap range showed characteristic differences between Ti-Ce oxide and Zr-Ce oxide. It is speculated that this difference is associated with structural effects.

}, doi = {10.1364/AO.37.005993}, author = {Monica Veszelei and Lisen Kullman and Claes G. Granqvist and Klaus von Rottkay and Michael D. Rubin} }