01036nas a2200169 4500008003900000022001400039245008800053210006900141260001200210300001600222490000700238520048400245100001900729700001700748700002200765856007900787 2014 d a0093-381300aDrifting Ionization Zone in DC Magnetron Sputtering Discharges at Very Low Currents0 aDrifting Ionization Zone in DC Magnetron Sputtering Discharges a c10/2014 a2578 - 25790 v423 a
Discharges with crossed electric and magnetic fields are known to develop instabilities that are crucial in the transport of charged particles. Sputtering magnetrons are no exception. While most recent studies focused on traveling ionization zones in high power impulse magnetron sputtering, we show here fast camera images of magnetron discharges at very low current. A single drifting ionization zone is always present, even down to the threshold current of about 10 mA.
1 aAnders, André1 aNi, Pavel, A1 aAndersson, Joakim uhttps://facades.lbl.gov/publications/drifting-ionization-zone-dc-magnetron