01350nas a2200181 4500008004100000245007700041210006900118260001200187300001400199490000700213520076000220100002100980700001901001700002501020700002301045700002301068856007701091 1998 eng d00aOptical Constants of Sputter-Deposited Ti-Ce Oxide and Zr-Ce Oxide Films0 aOptical Constants of SputterDeposited TiCe Oxide and ZrCe Oxide c09/1998 a5993-60010 v373 a
Films of Ti oxide, Zr oxide, Ce oxide, Ti-Ce oxide, and Zr-Ce oxide were made by means of reactive dc magnetron sputtering in a multitarget arrangement. The films were characterized by x-ray diffraction and electrochemical measurements, both techniques being firmly connected to stoichiometric information. The optical constants n and k were evalued from spectrophotometry and from variable-angle spectroscopic ellipsometry. The two analyses gave consistent results. It was found that n for the mixed-oxide films varied smoothly between the values for the pure oxides, whereas k in the band-gap range showed characteristic differences between Ti-Ce oxide and Zr-Ce oxide. It is speculated that this difference is associated with structural effects.
1 aVeszelei, Monica1 aKullman, Lisen1 aGranqvist, Claes, G.1 avon Rottkay, Klaus1 aRubin, Michael, D. uhttps://facades.lbl.gov/publications/optical-constants-sputter-deposited