01455nas a2200253 4500008003900000022001300039245012000052210006900172260001200241300001100253490000800264520065900272653002000931653001500951653002200966653002300988653001501011100001901026700002101045700001801066700002201084700001801106856007701124 2013 d a0003695100aDrifting potential humps in ionization zones: The “propeller blades” of high power impulse magnetron sputtering0 aDrifting potential humps in ionization zones The propeller blade c10/2013 a1441030 v1033 a
Ion energy distribution functions measured for high power impulse magnetron sputtering show features, such as a broad peak at several 10 eV with an extended tail, as well as asymmetry with respect to E × B, where E and B are the local electric and magnetic field vectors, respectively. Here it is proposed that those features are due to the formation of a potential hump of several 10 V in each of the traveling ionization zones. Potential hump formation is associated with a negative-positive-negative space charge that naturally forms in ionization zones driven by energetic drifting electrons.
10aElectric fields10aionization10aplasma ionization10asputter deposition10asputtering1 aAnders, André1 aPanjan, Matjaž1 aFranz, Robert1 aAndersson, Joakim1 aNi, Pavel, A. uhttps://facades.lbl.gov/publications/drifting-potential-humps-ionization