01808nas a2200241 4500008004100000022001500041245010500056210006900161260001200230300001200242490000700254520105000261653001501311653002401326653002201350653002501372653002101397100001801418700001801436700001901454700001901473856007401492 2004 eng d a0093-3813 00aEffect of Ion Mass and Charge State on Transport Vacuum Arc Plasmas Through a Biased Magnetic Filter0 aEffect of Ion Mass and Charge State on Transport Vacuum Arc Plas c04/2004 a433-4390 v323 a

The effect of ion mass and charge state on plasma transport through a 90 deg.-curved magnetic filter is experimentally investigated using a pulsed cathodic arc source. Graphite, copper, and tungsten were selected as test materials. The filter was a bent copper coil biased via the voltage drop across a low-ohm, selfbias resistor. Ion transport is accomplished via a guiding electric field, whose potential forms a trough shaped by the magnetic guiding field of the filter coil. Evaluation was done by measuring the filtered ion current and determination of the particle system coefficient, which can be defined as the ratio of filtered ion current, divided by the mean ion charge state, to the arc current. It was found that the ion current and particle system coefficient decreased as the mass-to-charge ratio of ions increased. This result can be qualitatively interpreted by a very simple model of ion transport that is based on compensation of the centrifugal force by the electric force associated with the guiding potential trough.

10aArc plasma10acathodic vacuum arc10aion charge states10amacroparticle filter10aplasma transport1 aByon, Eungsun1 aKim, Jong-Kuk1 aKwon, Sik-Chol1 aAnders, André uhttps://facades.lbl.gov/publications/effect-ion-mass-and-charge-state02094nas a2200133 4500008004100000050001500041245010000056210006900156260002300225520159700248100001801845700001901863856007801882 2003 eng d aLBNL-5156800aEffect of Underlayer on Coalescence of Silver Islands Grown by Filtered Cathodic Arc Deposition0 aEffect of Underlayer on Coalescence of Silver Islands Grown by F aSan Diegoc05/20033 a

Ultrathin silver films that are not continuous show relatively high absorption in the visible and low reflection in the infrared. For low-emissivity application on window glass, coalescence of silver islands is crucial for obtaining the desired optical properties of the coating, namely high transparence in the visible and high reflectivity in the infrared. It is well known that the energy of ions arriving at the substrate and the type of underlayer affect nucleation and growth of silver islands. There are a number of studies on nucleation and growth, but little is known about coalescence of silver islands synthesized by more energetic condensation, e.g. filtered cathodic vacuum arc (FCVA). In this work, the effect of underlayer on nucleation and growth of silver films deposited by FCVA was investigated by transmission electron microscopy (TEM) and atomic force microscopy (AFM). The results arescompared with data obtained by magnetron sputtering.

From the results, plane and titanium-oxide-coated glass requires more material to achieve the same value of resistance than for the zinc oxide coated glass. It is related with the energy of interaction between the surface and the silver atom. Silver films made by cathodic arc deposition show an earlier onset of island coalescence and formation of short links. It was found that silver islands in energetic deposition exhibit a reduced aspect ratio when compared to evaporation and sputtering. Nb underlayer affects nucleation and growth of coalescence of silver only in the case of few monolayer of Nb was introduced.

1 aByon, Eungsun1 aAnders, André uhttps://facades.lbl.gov/publications/effect-underlayer-coalescence-silver