01008nas a2200157   4500008004100000245008100041210006900122260001200191300001000203490000700213520048800220100002200708700002800730700001900758856007300777       2008                        eng d00aObservation of Ti4+ ions in a high power impulse magnetron sputtering plasma0 aObservation of Ti4 ions in a high power impulse magnetron sputte  c08/2008  a715040 v933 a<p>Multiply charged titanium ions including Ti<sup>4+</sup> were observed in high power impulse magnetron sputtering discharges. Mass/charge spectrometry was used to identify metal ion species. Quadruply charged titanium ions were identified by isotope-induced broadening at mass/charge 12. Due to their high potential energy, Ti<sup>4+</sup> ions give a high yield of secondary electrons, which in turn are likely to be responsible for the generation of multiply charged states.</p>1 aAndersson, Joakim1 aEhiasarian, Arutiun, P.1 aAnders, André  uhttps://facades.lbl.gov/publications/observation-ti4-ions-high-power01152nas a2200133   4500008004100000050001500041245007500056210006900131300001400200490000700214520069900221100001900920856007900939       2004                        eng d  aLBNL-5587600aObservation of Self-Sputtering in Energetic Condensation of Metal Ions0 aObservation of SelfSputtering in Energetic Condensation of Metal  a6137-61390 v853 a<p>The condensation of energetic metal ions on a surface may cause self-sputtering even in the absence of substrate bias. Charge-state-averaged self-sputtering yields were determined for both zirconium and gold ions generated by a cathodic vacuum arc. Films were deposited on differently biased substrates exposed to streaming Zr and Au vacuum arc plasma. The self-sputtering yields for both metals were estimated to be about 0.05 in the absence of bias, and exceeding 0.5 when bias reached - 50 V. These surprisingly high values can be reconciled with binary collision theory and molecular dynamics calculations taking high the kinetic and potential energy of vacuum arc ions into account.</p>1 aAnders, André  uhttps://facades.lbl.gov/publications/observation-self-sputtering-energetic