01380nas a2200229 4500008003900000022001300039245009800052210006900150260001200219300001100231490000800242520068000250653001400930653001500944653002300959653002200982653002001004100002201024700001701046700001901063856006801082 2013 d a0003695100aSpectroscopic imaging of self-organization in high power impulse magnetron sputtering plasmas0 aSpectroscopic imaging of selforganization in high power impulse c07/2013 a0541040 v1033 a
Excitation and ionization conditions in traveling ionization zones of high power impulse magnetron sputtering plasmas were investigated using fast camera imaging through interference filters. The images, taken in end-on and side-on views using light of selected gas and target atom and ion spectral lines, suggest that ionization zones are regions of enhanced densities of electrons, and excited atoms and ions. Excited atoms and ions of the target material (Al) are strongly concentrated near the target surface. Images from the highest excitation energies exhibit the most localized regions, suggesting localized Ohmic heating consistent with double layer formation.
10aAluminium10aionization10aIonizing radiation10aplasma ionization10avisible spectra1 aAndersson, Joakim1 aNi, Pavel, A1 aAnders, André uhttps://facades.lbl.gov/publications/spectroscopic-imaging-self01624nas a2200193 4500008004100000245010000041210006900141260001200210490000700222520098500229653002401214653000901238653001301247653003401260653002801294100001701322700001901339856007201358 2010 eng d00aSupersonic metal plasma impact on a surface: an optical investigation of the pre-surface region0 aSupersonic metal plasma impact on a surface an optical investiga c04/20100 v433 aAluminum plasma, produced in high vacuum by a pulsed, filtered cathodic arc plasma source, was directed onto a wall where if formed a coating. The accompanying "optical flare" known from the literature was visually observed, photographed, and spectroscopically investigated with appropriately high temporal (1 μs) and spatial (100 μm) resolution. Consistent with other observations using different techniques, it was found that the impact of the fully ionized plasma produces metal neutrals as well as desorbed gases, both of which interact with the incoming plasma. Most effectively are charge exchange collisions between doubly charged aluminum and neutral aluminum, which lead to a reduction of the flow of doubly charged before they reach the wall, and a reduction of neutrals as the move away from the surface. Those plasma-wall interactions are relevant for coating processes as well as for interpreting the plasma properties such as ion charge state distributions.
10acathodic arc plasma10aions10aneutrals10aoptical emission spectroscopy10aplasma-wall interaction1 aNi, Pavel, A1 aAnders, André uhttps://facades.lbl.gov/publications/supersonic-metal-plasma-impact