TY - JOUR T1 - Effect of Ion Mass and Charge State on Transport Vacuum Arc Plasmas Through a Biased Magnetic Filter JF - IEEE Transactions on Plasma Science Y1 - 2004/04// SP - 433 EP - 439 A1 - Eungsun Byon A1 - Jong-Kuk Kim A1 - Sik-Chol Kwon A1 - André Anders KW - Arc plasma KW - cathodic vacuum arc KW - ion charge states KW - macroparticle filter KW - plasma transport AB - The effect of ion mass and charge state on plasma transport through a 90 deg.-curved magnetic filter is experimentally investigated using a pulsed cathodic arc source. Graphite, copper, and tungsten were selected as test materials. The filter was a bent copper coil biased via the voltage drop across a low-ohm, selfbias resistor. Ion transport is accomplished via a guiding electric field, whose potential forms a trough shaped by the magnetic guiding field of the filter coil. Evaluation was done by measuring the filtered ion current and determination of the particle system coefficient, which can be defined as the ratio of filtered ion current, divided by the mean ion charge state, to the arc current. It was found that the ion current and particle system coefficient decreased as the mass-to-charge ratio of ions increased. This result can be qualitatively interpreted by a very simple model of ion transport that is based on compensation of the centrifugal force by the electric force associated with the guiding potential trough. VL - 32 IS - 2 U1 -

Windows and Daylighting Group

U2 - LBNL-53728 DO - 10.1109/TPS.2004.826363 ER - TY - CONF T1 - Effect of Underlayer on Coalescence of Silver Islands Grown by Filtered Cathodic Arc Deposition T2 - The International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2003) Y1 - 2003/05// A1 - Eungsun Byon A1 - André Anders AB - Ultrathin silver films that are not continuous show relatively high absorption in the visible and low reflection in the infrared. For low-emissivity application on window glass, coalescence of silver islands is crucial for obtaining the desired optical properties of the coating, namely high transparence in the visible and high reflectivity in the infrared. It is well known that the energy of ions arriving at the substrate and the type of underlayer affect nucleation and growth of silver islands. There are a number of studies on nucleation and growth, but little is known about coalescence of silver islands synthesized by more energetic condensation, e.g. filtered cathodic vacuum arc (FCVA). In this work, the effect of underlayer on nucleation and growth of silver films deposited by FCVA was investigated by transmission electron microscopy (TEM) and atomic force microscopy (AFM). The results arescompared with data obtained by magnetron sputtering.From the results, plane and titanium-oxide-coated glass requires more material to achieve the same value of resistance than for the zinc oxide coated glass. It is related with the energy of interaction between the surface and the silver atom. Silver films made by cathodic arc deposition show an earlier onset of island coalescence and formation of short links. It was found that silver islands in energetic deposition exhibit a reduced aspect ratio when compared to evaporation and sputtering. Nb underlayer affects nucleation and growth of coalescence of silver only in the case of few monolayer of Nb was introduced. JF - The International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2003) CY - San Diego U1 -

Windows and Daylighting Group

U2 - LBNL-51568 ER -