TY - JOUR T1 - Optical Constants of Sputter-Deposited Ti-Ce Oxide and Zr-Ce Oxide Films JF - Applied Optics Y1 - 1998/09// SP - 5993 EP - 6001 A1 - Monica Veszelei A1 - Lisen Kullman A1 - Claes G. Granqvist A1 - Klaus von Rottkay A1 - Michael D. Rubin AB - Films of Ti oxide, Zr oxide, Ce oxide, Ti-Ce oxide, and Zr-Ce oxide were made by means of reactive dc magnetron sputtering in a multitarget arrangement. The films were characterized by x-ray diffraction and electrochemical measurements, both techniques being firmly connected to stoichiometric information. The optical constants n and k were evalued from spectrophotometry and from variable-angle spectroscopic ellipsometry. The two analyses gave consistent results. It was found that n for the mixed-oxide films varied smoothly between the values for the pure oxides, whereas k in the band-gap range showed characteristic differences between Ti-Ce oxide and Zr-Ce oxide. It is speculated that this difference is associated with structural effects. VL - 37 IS - 25 U1 -

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U2 - LBNL-42059 DO - 10.1364/AO.37.005993 ER -