TY - CONF T1 - Origin of Strain in GaN Thin Films T2 - 23rd International Conference on the Physics of Semiconductors Y1 - 1996/ SP - 513 A1 - Christian F. Kisielowski A1 - Joachim Krüger A1 - Michael S.H. Leung A1 - Ralf Klockenbrink A1 - Hiroaki Fujii A1 - Tadeusz Suski A1 - Sudhir G. Subramanya A1 - Joel W. Ager III A1 - Michael D. Rubin A1 - Eicke R. Weber ED - Joachim Krüger AB - Photoluminescence measurements are used to determine the strain in GaN thin films grown by Molecular Beam Epitaxy. The strain which originates from growth on lattice mismatched substrates and from differences in thermal expansion coefficients is found to be greatly relaxed. Residual strains are shown to depend on the thickness of GaN buffer layers and the III/V flux ration during main layer growth. The results strongly suggest that the residual biaxial strain caused by the post-growth cooling can be modified by the incorporation of point defects during the main layer growth which introduce an additional hydrostatic strain field. The effect allows for strain engineering of GaN crystals. JF - 23rd International Conference on the Physics of Semiconductors CY - Singapore VL - 4 U1 -

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U2 - LBNL-39853 ER -