%0 Journal Article %J IEEE Transactions on Plasma Science %D 1999 %T Evaluation of the Plasma Distribution of a Quasi-Linear Constricted Plasma Source %A André Anders %A Robert A. MacGill %A Michael D. Rubin %K Constricted plasma source %K gas plasma flow %K plasma diagnostics %K plasma processing of materials %X

The quasi-linear constricted plasma source is a downstream plasma source with ten linearly aligned discharge cells. Each cell operates on the basis of a constricted glow discharge. The plasma output can easily be monitored by the plasma-emitted light. The information is not only intuitive but can also be used to operate on-line feedback control of the plasma source which is important for large-area plasma processing of materials.

%B IEEE Transactions on Plasma Science %V 27 %P 82-83 %8 02/1999 %G eng %N 1 %1

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%2 LBNL-42016 %& 82