Publications
Export 56 results:
[ Author] Title Type Year Filters: First Letter Of Last Name is A [Clear All Filters]
"Working Principle of the Hollow-Anode Plasma Source." Plasma Source Science and Technology 4.4 (1995) 571-575. LBL-36240.
. "Filtered cathodic arc deposition with ion-species-selective bias." Review of Scientific Instruments (2006). LBNL-61733.
. "A Plasma Lens for Magnetron Sputtering." IEEE Transactions on Plasma Science 39.11 (2011) 2528 - 2529.
. "Plasma and Ion Sources in Large Area Coatings: A Review." 2005. LBNL-57127.
. "Plasma and Ion Assistance in Physical Vapor Deposition: A Historical Perspective." 50th Technical Annual Meeting of the Society of Vacuum Coaters. 2007. LBNL-61903.
. "Drifting Ionization Zone in DC Magnetron Sputtering Discharges at Very Low Currents." IEEE Transactions on Plasma Science 42.10 (2014) 2578 - 2579.
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