The ‘recycling trap’: a generalized explanation of discharge runaway in high-power impulse magnetron sputtering
Title | The ‘recycling trap’: a generalized explanation of discharge runaway in high-power impulse magnetron sputtering |
Publication Type | Journal Article |
Year of Publication | 2012 |
Authors | André Anders, Jiří Čapek, Matêj Hála, Ludvik Martinu |
Journal | Journal of Physics D: Applied Physics |
Volume | 45 |
Issue | 1 |
Pagination | 012003 |
Date Published | 01/2012 |
ISSN | 0022-3727 |
Abstract | Contrary to paradigm, magnetron discharge runaway cannot always be related to self-sputtering. We report here that the high density discharge can be observed with all conducting targets, including low sputter yield materials such as carbon. Runaway to a high density discharge is therefore generally based on self-sputtering in conjunction with the recycling of gas atoms in the magnetic field-affected pre-sheath. A generalized runaway condition can be formulated, offering a pathway to a time-dependent model for high-power impulse magnetron sputtering that includes rarefaction and an explanation for the termination of runaway. |
DOI | 10.1088/0022-3727/45/1/012003 |
Short Title | J. Phys. D: Appl. Phys. |